View factor modeling of sputter-deposition on micron-scale-architectured surfaces exposed to plasma

TitleView factor modeling of sputter-deposition on micron-scale-architectured surfaces exposed to plasma
Publication TypeJournal Article
Year of Publication2016
AuthorsHuerta, Cesar E.
Secondary AuthorsMatlock, Taylor S.
Tertiary AuthorsWirz, Richard E.
JournalJournal of Applied Physics
Volume119
Issue11
Date Published03/2016
DOI10.1063/1.4944035