In situ plasma sputtering and angular distribution measurements for structured molybdenum surfaces

TitleIn situ plasma sputtering and angular distribution measurements for structured molybdenum surfaces
Publication TypeJournal Article
Year of Publication2017
AuthorsLi, Gary Z., Taylor S. Matlock, Dan M. Goebel, Chris A. Dodson, Chris S. R. Matthes, Nasr M. Ghoniem, and Richard E. Wirz
JournalPlasma Sources Science and Technology
Volume26
Issue6
Date Published04/2017
AbstractWe present in situ sputtering yield measurements of the time-dependent erosion of flat and micro-architectured molybdenum samples in a plasma environment. The measurements are performed using the plasma interactions (Pi) Facility at UCLA, which focuses a magnetized hollow cathode plasma to a material target with an exposure diameter of approximately 1.5 cm. During plasma exposure, a scanning quartz crystal microbalance (QCM) provides angular sputtering profiles that are integrated to estimate the total sputtering yield. This technique is validated to within the scatter of previous experimental data for a planar molybdenum target exposed to argon ion energies from 100 to 300 eV. The QCM is then used to obtain in situ measurements during a 17 h exposure of a micro-architectured-surface molybdenum sample to 300 eV incident argon ions. The time-dependent angular sputtering profile is shown to deviate from classical planar profiles, demonstrating the unique temporal and spatial sputtering effects of micro-architectured materials. Notably, the sputtering yield for the micro-architectured sample is initially much less than that for planar molybdenum, but then gradually asymptotes to the value for planar molybdenum after approximately 10 h as the surface features are eroded away
DOI10.1088/1361-6595/aa6a7d

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