Fluence-dependent sputtering yield of micro-architectured materials

TitleFluence-dependent sputtering yield of micro-architectured materials
Publication TypeJournal Article
Year of Publication2017
AuthorsMatthes, Chris S. R., Nasr M. Ghoniem, Gary Z. Li, Taylor S. Matlock, Dan M. Goebel, Chris A. Dodson, and Richard E. Wirz
JournalApplied Surface Science
Volume407
Pagination223–235
Date Published02/2017

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